The Fan Filter Unit (FFU), a modular terminal air purification and treatment device equipped with filtration capabilities and a self-contained power unit, finds extensive application in cleanrooms, clean workbenches, clean production lines, modular cleanrooms, and also in production lines of industries such as semiconductors, electronics, and flat panel displays, where strict control over airborne contamination is essential. Below is a detailed introduction to the FFU:
I. Working Principle
The FFU generates airflow through its fan, drawing in the air to be purified from its top. This air then passes through filters (such as High-Efficiency Particulate Air, HEPA, or Ultra-Low Penetration Air, ULPA filters) before being uniformly expelled through the outlet vents, thereby meeting the air quality requirements within the cleanroom.
II. Components
The FFU typically comprises the following main components:
Fan: Provides the motive force for airflow.
Filter: Removes particulates like dust, bacteria, and viruses from the air. Common filters include pre-filters, HEPA filters, and activated carbon filters.
Housing: Protects internal components and serves as a channel for airflow.
Controller: Regulates the operation of the fan and the status of the filters.
III. Features and Advantages
Flexibility: The FFU boasts a highly flexible design, allowing for modular connection and usage based on specific cleanroom requirements, thereby satisfying various cleanliness levels.
Space-Saving: As the FFU incorporates both a fan and filtration unit, it eliminates the need for additional ducts and return air systems, resulting in a relatively small footprint.
Cost-Effectiveness and Efficiency: The FFU operates with minimal power consumption, significantly reducing operational costs compared to traditional centralized air-conditioning systems. Furthermore, its integrated fan and filter unit facilitate uniform airflow distribution through computer-based group control, offering greater convenience, speed, and efficiency than valve-controlled centralized systems.
Uniform and Stable Airflow: The FFU ensures uniform and stable airflow through precise fan control and filter design, meeting the stringent requirements for air movement within cleanrooms.
Negative Pressure Sealing: The FFU's supply air mode utilizes a negative pressure plenum, simplifying seal installation at air outlets. Even in the event of leakage, air escapes from the cleanroom into the FFU's plenum, preventing contamination of the cleanroom.
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